JPS6423868U - - Google Patents
Info
- Publication number
- JPS6423868U JPS6423868U JP11797887U JP11797887U JPS6423868U JP S6423868 U JPS6423868 U JP S6423868U JP 11797887 U JP11797887 U JP 11797887U JP 11797887 U JP11797887 U JP 11797887U JP S6423868 U JPS6423868 U JP S6423868U
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- coupled plasma
- plasma torch
- mass spectrometer
- inductively coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 4
- 238000009616 inductively coupled plasma Methods 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797887U JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797887U JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6423868U true JPS6423868U (en]) | 1989-02-08 |
| JPH0518845Y2 JPH0518845Y2 (en]) | 1993-05-19 |
Family
ID=31361924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11797887U Expired - Lifetime JPH0518845Y2 (en]) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518845Y2 (en]) |
-
1987
- 1987-07-31 JP JP11797887U patent/JPH0518845Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518845Y2 (en]) | 1993-05-19 |
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